| Abstract [eng] |
Nowadays the field of laser micro-fabrication of transparent materials is growing rapidly and as the miniaturization process progresses, micro-systems are able to integrate more functions. Currently available laser systems deliver very intensive femtosecond pulses which lets us to precisely fabricate complex three-dimensional volume modifications in glass. It works because of a residual volume modification (type II) and it's chemical properties. These modifications may be used for development of micro-electro-mechanical devices. One of the simplest and widely used in micro-actuators structures is a cantilever beam which alone can be used in precise micro-movement detection, estimation of deformation of microstructures due to the applied forces, atomic microscopes, micro-grippers and etc. The movement of cantilever beams is based on the fused quartz bending properties without deformations in microstructures when the stress distribution doesn't overcome the tensile strength. This work represents a finite element method analysis model made with Comsol Multiphysics software and parameter optimization simulations for a voltage-actuated cantilever beam with 5 different flexure hinges. It analyses why analytical model is not suitable in this situation and shows that the finite element method analysis there is a must. It demonstrates that the simulation results are similar to those, achieved in real manufactured models. The optimal parameter sets are given, which lets to achieve a stable 9 – 12 µm and non-stable < 26 µm displacements. The real ~ 8.48 µm displacement is shown. It demonstrates that with these optimal parameter sets the stress distributions doesn't overcome the elastic limit of the material and that there are almost no stresses outside the hinges of cantilever. The value of the first fundamental eigenmode eigenfrequency is given which could be used with alternating voltage to enlarge beam's movement amplitude and periodically swing it to the both sides. |
