| Title |
Thermodynamical analysis of the formation of α-Si ring structures on silicon surface / |
| Authors |
Jarutis, Vygandas ; Paipulas, Domas ; Jukna, Vytautas |
| DOI |
10.3390/ma16062205 |
| Full Text |
|
| Is Part of |
Materials.. Basel : MDPI. 2023, vol. 16, no. 6, art. no. 2205, p. [1-11].. eISSN 1996-1944 |
| Keywords [eng] |
laser micromachining ; silicon ablation ; ultrafast lasers |
| Abstract [eng] |
Superficial modifications on silicon wafers produced by single-shot focused femtosecond laser irradiation having a 1030 nm wavelength and 300 fs pulse duration were experimentally and theoretically analyzed. The laser fluence window when the amorphous silicon phase develops, resulting in a ring-like modification shape, was experimentally estimated to be between 0.26 J/cm2 and 0.40 J/cm2 and was independent of the silicon dopant type and laser focusing conditions; however, the window was narrower when compared to results reported for shorter pulse durations. In addition, we present a simplified numerical model that can explain and predict the formation of these patterns based on the caloric coefficients of silicon and the energy distribution of the deposited material. |
| Published |
Basel : MDPI |
| Type |
Journal article |
| Language |
English |
| Publication date |
2023 |
| CC license |
|
