| Abstract [eng] |
This work intends to create optimized for THz range compact arrays of InGaAs bow-tie type sensors and to explore the possibilities of their applications. Depending on the simulated different metallic area resonances, new optimum InGaAs bow-tie shape designs for THz frequency range were created. Detailed electrical characterization by Kelvin probe force, scanning tunneling microscopy measurements, Synapsys TCAD and FDTD simulations were performed. These results let to supplement the principle of detection mechanism by field-effect caused by surface charge. InGaAs bow-tie detector performance in direct and heterodyne modes was compared. The detector sensitivity was estimated to reach 6 V/W at direct detection mode and imaging system dynamic range enhancement more than 40 dB was observed in heterodyne mode. These bow-tie sensor arrays with integrated low noise amplifiers have been applied for parallel signal read out in order to shorten THz imaging time. Developed diffractive optics components, which have a sharp focusing performance and advantage of high selectivity in a frequency scale, let to improve the spatial resolution of imaging system up to 25 %. Also, the zone plate integration idea on the substrate of bow-tie device was presented and successfully employed by increasing the sensors signal amplitude more than 20 times. |
