| Abstract [eng] |
Diversiform black silicon for bio-sensing The Thesis is dedicated to the design, computational analysis, fabrication, and testing of low-cost, stable, and scalable substrates based on diversiform black silicon sputtered with gold pseudo-layer for NIR surface-enhanced Raman spectroscopy (SERS) of living cells, organic molecules, and carbon-based nanomaterials. The black silicons were produced by either cryogenic or room temperature inductively coupled plasma reactive ion etching; gold pseudo-layer was magnetron-sputtered. The surface micro-structuring was tuned by the fabrication process variation, resulting in hydrophilic interfaces for living cell analysis or hydrophobic surfaces for analytical applications. A cone-like black silicon substrate coated with a 50-80 nm gold pseudo-layer showed excellent uniformity, an enhancement factor of 108, and was applied for living cell investigation. Computational simulation of the silicon-gold core-shell structures proved location of their optical resonance in 700-800 nm, adjustable by the gold layer thinning. It was validated by reducing gold thickness down to 25-50 nm and 10-25 nm for lace- and pillar-like black silicons, respectively. Implementation of black silicon-based SERS allowed revealing a hypochlorite-mediated biodegradation of carbon-based nanomaterials upon activation of neutrophils during cancer theranostics. These findings enable affordable, widespread SERS implementation in diverse applications, from nanomaterial science to biomedicine. |
