| Abstract [eng] |
Over the past decades, ceramic materials and the 3D structures derived from them have been receiving increasing attention due to their exceptional mechanical, chemical, and thermal properties. As interest in 3D ceramic micro/nanostructures grows, there is a corresponding rise in demand for new materials and production processes for creating 3D entities. Therefore, the aim of this dissertation is to synthesize various metal organic compounds using sol-gel methods and produce ceramic/crystalline 3D micro/nanostructures through the combination of femtosecond laser photopolymerization and pyrolysis. This dissertation demonstrates high-resolution and robust methods for fabricating 3D ceramic structures, encompassing the synthesis of novel materials, their application in 3D multiphoton lithography, and changes in structural crystalline phases following thermal processing. A novel direct method for measuring the crystalline phase of 3D microstructures is introduced for the first time. Also, a resolution record was achieved. The width of lines in periodic 3D ceramic SiO2/ZrO2 structures was less than 60 nm. Additionally, a new silicon-organic material with unique mechanical properties was developed. When this material was employed in 3D lithography and the resulting structures underwent pyrolysis, it was observed that amorphous SiOC or crystalline SiC and/or α,β-Si3N4 structures formed. These structures remained free from defects, with hardness and reduced elastic modulus measuring approximately ≈15 GPa and ≈105 GPa. These accomplishments have addressed the challenges in producing solid and precise 3D structures and expanded this technology's potential applications in the industry. |
