| Abstract [eng] |
This thesis is dedicated to investigation of carrier dynamics in 3C-SiC crystals and heterostructures by using light-induced transient gratings and differential transmission techniques. The experimental studies in a wide range of excess carrier densities and temperatures revealed the influence of several particular growth conditions in different growth techniques on electronic properties of grown layers, and hence, a possibility to characterize indirectly the structural perfection of a layer by non-destructive optical means. Based on these results, we were able to evaluate and compare quality of 3C-SiC specimens manufactured by nearly all currently available growth techniques and to distinguish the most promising growth methods for 3C-SiC semiconductor. Moreover, we found a novel way, based on DT technique, to determine the carrier trap concentration in finite thickness layers, as well as to attribute them to specific impurity species. Finally, we investigated the influence of substrate surface features on carrier lifetime and mobility of the overgrown layers. |
