| Abstract [eng] |
Three tantalum pentoxide layers were deposited – one using standard parameters, one at higher temperatures, and one at higher temperature with increased substrate rotation speeds. The absorption of 1070 nm wavelength light after annealing is similar for all investigated samples. For Ta2O5/SiO2 antireflective coating negligible correlation between absorption and LIDT was found. Two antireflective coatings consisting of different high refractive index materials were formed in order to investigate correlation between absorption and LIDT in the ultraviolet spectral region. It was discovered that despite having higher bandgap value, and lower measured absorption, aluminum oxide-based coating have lower LIDT, and more rapid coating degradation compared to hafnium oxide coatings (at 355 nm wavelength). |
