| Title |
Interferometric microscale measurement of refractive index at VIS and IR wavelengths / |
| Authors |
Ryu, Meguya ; Varapnickas, Simonas ; Gailevičius, Darius ; Paipulas, Domas ; Puig I Vilardell, Eulalia ; Khajehsaeidimahabadi, Zahra ; Juodkazis, Saulius ; Morikawa, Junko ; Malinauskas, Mangirdas |
| DOI |
10.21468/SciPostPhysCore.7.3.059 |
| Full Text |
|
| Is Part of |
SciPost physics core.. Amsterdam : SciPost Foundation. 2024, vol. 7, art. no. 059, p. [1-15].. eISSN 2666-9366 |
| Abstract [eng] |
Determination of refractive index of micro-disks of a calcinated ( 1100^\circ 1100 ∘ C in air) photo-resist SZ2080 ^\mathrm{TM} T M was carried out using transmission and reflection spectroscopy. Interference fringes at specific wavenumbers/wavelengths were selected for determination of the optical thickness, hence, the refractive index when the thickness of micro-disks was measured by scanning electron microscopy (SEM). Refractive index of disks of \sim 6± 1~\mu ∼ 6 ± 1 μ m thickness were determined at visible and IR (2.5-13~ \mu μ m) spectral ranges and where 2.2± 0.2 2.2 ± 0.2 at visible and IR wavelengths. Peculiarities of optical characterisation of micro-optical structures are discussed in view of possible uncertainties in the definition of geometric parameters, shape and mass density redistribution. |
| Published |
Amsterdam : SciPost Foundation |
| Type |
Journal article |
| Language |
English |
| Publication date |
2024 |
| CC license |
|
