| Title |
Surface roughness control in deep engraving of fused silica using femtosecond laser ablation / |
| Authors |
Kažukauskas, Evaldas ; Butkus, Simas ; Jukna, Vytautas ; Paipulas, Domas |
| DOI |
10.1016/j.surfin.2024.104471 |
| Full Text |
|
| Is Part of |
Surfaces and interfaces.. Amsterdam : Elsevier. 2024, vol. 50, art. no. 104471, p. [1-10].. ISSN 2468-0230 |
| Keywords [eng] |
femtosecond pulses ; laser ablation ; surface roughness ; scanning algorithms ; deep engraving |
| Abstract [eng] |
The capability to control the surface morphology during ultrafast laser micromachining at different engraved depths for transparent dielectric materials is of great importance in many applications, such as micromechanics, free-form optics, medical implants. The precise surface roughness management during deep engraving in most cases can be achieved by fine tuning of laser and scanning parameters utilizing material-dependent optimization strategies. In this study, we have compared and investigated the influence of different laser scanning algorithms for deep engraving of fused silica in order to establish the methods capable to provide a flexible control on machined surface roughness. We show that control of surface roughness in a broad range is possible with a resolution of, with the possibility to reduce surface roughness down to 100 nm without any post-processing. While the achieved values demonstrated in this work are wavelength-, algorithm- and material-dependant, we provide the general processing strategy that could nullify discrete laser patterning artefacts, while the magnitude of laser-induced nanostructures dictates the lower limit of resulting surface roughness in ultrafast laser processing. |
| Published |
Amsterdam : Elsevier |
| Type |
Journal article |
| Language |
English |
| Publication date |
2024 |
| CC license |
|
