Title Optically clear and resilient free-form µ-optics 3D-printed via ultrafast laser lithography /
Authors Jonušauskas, Linas ; Gailevičius, Darius ; Mikoliūnaitė, Lina ; Sakalauskas, Danas ; Šakirzanovas, Simas ; Juodkazis, Saulius ; Malinauskas, Mangirdas
DOI 10.3390/ma10010012
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Is Part of Materials.. Basel : MDPI AG. 2017, Vol. 10, No. 1, Art. No. 12.. ISSN 1996-1944
Keywords [eng] direct laser writing ; ultrafast laser ; 3D laser lithography ; 3D printing ; hybrid polymer ; integrated micro-optics ; optical damage ; photonics ; pyrolysis ; ceramic 3D structures
Abstract [eng] We introduce optically clear and resilient free-form micro-optical components of pure (non-photosensitized) organic-inorganic SZ2080 material made by femtosecond 3D laser lithography (3DLL). This is advantageous for rapid printing of 3D micro-/nano-optics, including their integration directly onto optical fibers. A systematic study of the fabrication peculiarities and quality of resultant structures is performed. Comparison of microlens resiliency to continuous wave (CW) and femtosecond pulsed exposure is determined. Experimental results prove that pure SZ2080 is ∼20 fold more resistant to high irradiance as compared with standard lithographic material (SU8) and can sustain up to 1.91 GW/cm2 intensity. 3DLL is a promising manufacturing approach for high-intensity micro-optics for emerging fields in astro-photonics and atto-second pulse generation. Additionally, pyrolysis is employed to homogeneously shrink structures up to 40% by removing organic SZ2080 constituents. This opens a promising route towards downscaling photonic lattices and the creation of mechanically robust glass-ceramic microstructures.
Published Basel : MDPI AG
Type Journal article
Language English
Publication date 2017