| Abstract [eng] |
This work describes the use of scanning probe microscopy techniques to investigate the properties of 2D materials on 3D metal contacts. The main focus is drawn to the van der Waals gap of the aforementioned structures in order to investigate them under mechanical and thermal stress in nanoscale using modified scanning probe microscopy methods. In the first part of the work conductance atomic force microscopy is used to modify the thickness of van der Waals gap by applying mechanical pressure and measuring electrical current, which results show good agreement with theory. Alongside C-AFM experiments, atomic force microscopy measurements in tapping mode are carried out for measuring graphene layer thickness after thermal annealing, which showed results of thickness decrease in graphene layer. In the second part of this work scanning Kelvin probe microscopy is used to assess the surface potential of a graphene device under biased conditions, in situ, which showed contact resistance decrease after thermal annealing and increase in sheet resistance. With the use of custom – made probes for sample biasing, it was shown, that scanning probe microscopy methods are suitable for nanoelectrical measurements of 2D and 3D material structures. |
