| Title |
Tipping solutions: emerging 3D nano-fabrication/-imaging technologies / |
| Authors |
Seniutinas, Gediminas ; Balčytis, Armandas ; Reklaitis, Ignas ; Chen, Feng ; Davis, Jeffrey ; David, Christian ; Juodkazis, Saulius |
| DOI |
10.1515/nanoph-2017-0008 |
| Full Text |
|
| Is Part of |
Nanophotonics.. Berlin : Walter de Gruyter GmbH. 2017, Vol. 6, Iss. 5, p. 923-941.. ISSN 2192-8606. eISSN 2192-8614 |
| Keywords [eng] |
Nanotechnology ; nanofabrication ; nanophotonics ; 3D fabrication ; nanoscale |
| Abstract [eng] |
The evolution of optical microscopy from an imaging technique into a tool for materials modification and fabrication is now being repeated with other characterization techniques, including scanning electron microscopy (SEM), focused ion beam (FIB) milling/imaging, and atomic force microscopy (AFM). Fabrication and in situ imaging of materials undergoing a three-dimensional (3D) nano-structuring within a 1-100 nm resolution window is required for future manufacturing of devices. This level of precision is critically in enabling the cross-over between different device platforms (e.g. from electronics to micro-/nano-fluidicsand/or photonics) within future devices that will be interfacing with biological and molecular systems in a 3D fashion. Prospective trends in electron, ion, and nano-tip based fabrication techniques are presented. |
| Published |
Berlin : Walter de Gruyter GmbH |
| Type |
Journal article |
| Language |
English |
| Publication date |
2017 |
