| Title |
Legiravimo įtaka CVD technologijos SiNx:H sluoksnių elektrinėms ir optinėms savybėms / |
| Translation of Title |
Influence of dopoing on the optical and electrical properties of SINx:H films deposited using CVD technology. |
| Authors |
Grigaitis, Tomas |
| Full Text |
|
| Pages |
103 |
| Keywords [eng] |
CVD ; silicon nitride ; superlatice |
| Abstract [eng] |
In this work, we report our study of influence of various thickness sublayers to EL from a-Si:H/SiNx SLs and we demonstrate the electroluminescence from the thin a-SiNx films with embedded cerium atoms. |
| Dissertation Institution |
Vilniaus universitetas. |
| Type |
Doctoral thesis |
| Language |
Lithuanian |
| Publication date |
2017 |
