Title Šviesos pagavimo struktūrų formavimas fotovoltiniams elementams, naudojant lazerinę interferencinę abliaciją /
Translation of Title Formation of light harvesting structures for photovoltaics using laser interference ablation.
Authors Indrišiūnas, Simonas
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Pages 37
Keywords [eng] light harvesting ; laser interference ablation ; laser microfabrication
Abstract [eng] In this PhD thesis, application of patterning with interfering laser beams for the fabrication of light harvesting structures for the photovoltaic elements was investigated. Interference patterning technique was used to pattern antireflective silicon nitride layer on silicon solar cells, crystalline or multicrystalline silicon substrates and thin metal films. Using the irradiation fluence below the ablation threshold, silicon nitride was locally converted to silicon oxide/oxy-nitride. This resulted in increased absorption of the element in the visible spectral range and improved electric characteristics of the solar cell. Interference patterning technique, combined with anisotropic or isotropic wet chemical etching, was used for the fabrication of the inverted pyramid pattern in crystalline silicon and periodic dimple pattern in monocrystalline silicon. The optimal irradiation conditions were determined. Fabrication of sub-micrometre patterns was investigated. In this case, heat diffusion in the volume between the maximal intensity spots plays a significant role. A three-dimensional model for heat diffusion simulation was introduced. In the last chapter of this thesis, improvements of the interference patterning setup are discussed. Methods to ensure uniform large area fabrication and to increase interference patterning flexibility are discussed.
Dissertation Institution Vilniaus universitetas.
Type Summaries of doctoral thesis
Language Lithuanian
Publication date 2018