| Abstract [eng] |
The purpose of this paper is to investigate the properties of photonic crystal waveguides for terahertz frequency range formed by anisotropic etching in highly resistive silicon monocrystal wafers. Meep software was used for the simulations of anisotropically etched silicon. Results was processed with GNU Octave software, suitable with Linux operating system. In case of thin 100 μm silicon wafers waveguide loss of  = 0,023 cm-1 was evaluated for 0,3 THz frequency. This value is close to experimental ones obtained for photonic crystal with cilindrical holes and reported in literature sources. This fact confirms that pyramyde-shaped structures can ensure sufficient differences of refraction index for an efficient mode confinement. Increasing thickness of wafers leads to efficiency loss in the waveguide increases very fast (for example 27 times by increasing the thickness of wafer just 1,5 times) because of fixed inclination angles of inverted pyramids walls, which is determined by crystal Si planes, leading either small removed silicon amount or ever unetched Si layer above inverted pyramids peaks. |
