| Title |
Visuminės integruotos sklaidos matavimai, naudojant moduliuotos kokybės Nd:IAG lazerio harmonikas, ir jų taikymai įvairiuose lazerinių komponentų gamybos procesuose / |
| Translation of Title |
Measurements of total integrated scattering using Q-switched Nd:YAG laser harmonics and their applications for Different Manufacturing Processes of Laser Optical Components. |
| Authors |
Mažulė, Lina |
| Full Text |
|
| Pages |
212 |
| Keywords [eng] |
Total integrated scattering ; optical components ; metrology ; optical manufacturing |
| Abstract [eng] |
The Total Integrated Scattering (TIS) measurement setup is presented in this thesis. This setup is prepared according ISO13696 standard. The main difference from the other scattering setups is that measurements are performed in closed clean chamber rather than in the clean room. The facilities are extended with the three harmonics of Nd:YAG Q-Switch laser. The TIS measurements are used for the quality control of optical components after changes of the manufacturing processes. The TIS losses are presented for optical substates after etching with different powers of RF source of argon plasma and after additional treatment with oxygen and annealing. The TIS losses showed uneven and defective surface after etching. Though the surface quality looked better than before etching. The investigation of TIS losses was performed for thin films of Nd2O5 and ZrO2 mixtures with SiO2 and mirrors prepared with porous and dense SiO2 layers. The results showed that the surface roughness evaluated form TIS losses corelated with roughness measured by atomic force microscope, except for polycrystalline and porous coatings. The last investigation of TIS was performed for optical components prepared by writing of nanogratings in the volume of fused silica. The TIS measurement assisted to choose the best writing parameters. |
| Dissertation Institution |
Vilniaus universitetas. |
| Type |
Doctoral thesis |
| Language |
Lithuanian |
| Publication date |
2020 |
