| Title |
Investigation of the laser cleaning process for ibs grids in optical coating technology / |
| Translation of Title |
Dielektrinių dangų nusėdančių ant jonapluoščio dulkinimo įrenginyje naudojamų gardelių šalinimo lazerinės abliacijos metodu eksperimentinis tyrimas. |
| Authors |
Bitinaitis, Ignas |
| Full Text |
|
| Pages |
24 |
| Keywords [eng] |
Laser Cleaning, IBS, Grids, Coating, Technology, removal, Lazerinis valymas, gardelės, optinės, optinių, dangos, dangų, šalinimas |
| Abstract [eng] |
This work describes the process of laser cleaning of an Ion-Beam Sputtering (IBS) grid and magnetron sputtering (MS) substrates shutter as an alternative to manual cleaning and sandblasting in terms of the surface morphology, roughness and speed. It has been demonstrated that processing with a nanosecond fiber laser might be applied for the controlled cleaning of complex grid surfaces at high speed and low surface impact that is important for longer lifetime of expensive parts. Thus, laser cleaning can be successfully applied to quickly and safely remove deposits in optical coating technology. Under optimal processing conditions in а single pass, the scanning speed in the focal plane was 8 m/s at a laser pulse energy of 0,3 mJ, a pulsewidth of 120 ns at a repetition rate of 100 kHz. |
| Dissertation Institution |
Vilniaus universitetas. |
| Type |
Master thesis |
| Language |
English |
| Publication date |
2021 |
