| Abstract [eng] |
Laser Direct Writing (LDW) allows for the fabrication of complex free-form structures, particularly advantageous in micro-optic applications when used in conjunction with high-performance polymers, such as SZ2080™. Heat treatment at high temperatures (calcination) of such hybrid organic-inorganic polymers produces highly resilient clear inorganic glass structures with homogeneous shrinkage, particularly useful in high-intensity applications. Nonetheless, high-complexity and integrated micro-optical elements often manifest multiple interfaces, resulting in increased Fresnel reflection losses. While conventional physical vapor deposition processes are usually employed in the manufacture of high-precision optics, such methods are incapable of producing uniform coatings on micrometer scale complex free-form structures. Atomic Layer Deposition (ALD) is an alternative highly flexible coating process, able to coat intricate geometries down to nano-scale. This work investigates the use of LDW in conjunction with calcination and ALD in the production of highly efficient anti-reflective (AR) coated functional free-form sub-100 μm micro-optic elements - polymer singlet lenses, multi-layer platforms and triplet objectives, as well as shrinkage - adjusted triplets, which were successfully heat treated into silica-zirconia glass. Production was followed by optical quantitative and qualitative analysis. Calcinated SZ2080™ - derived glass micro-optical elements retained clarity and optical function. Low-temperature deposition of aluminum oxide and titanium oxide AR coating proved to be compatible with SZ2080™ polymer and calcinated glass structures, as no loss of optical function was observed. In addition, a substantial increase in transmittance, up to 99.9% per interface, is seen. |
