Title Analysis of surface microdefects localization possibilities /
Translation of Title Анализ возможностей локализации поверхностных микродефектов.
Translation of Title Paviršinių mikrodefektų lokalizavimo galimybių tyrimas.
Authors Bulbenkienė, V ; Pūras, R ; Sakalauskas, S
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Is Part of Electronics and electrical engineering = Электроника и электротехника = Elektronika ir elektrotechnika.. Kaunas : Technologija. 2006, no. 6 (70), p. 87-90.. ISSN 1392-1215. eISSN 2029-5731
Abstract [eng] Analysis of linear spatial resolution of vibrating Kelvin–Zisman electrode is carried out in case when the size of defective area is substantially less than diameter of vibrating probe. Dependence of relative error of voltage determination and defective area center’s coordinate determination on scanning speed was examined and influence of measuring device pass band was estimated also. Analysis of theoretical results and carried out experiments on real samples and its models allows us to state that contactless capacitic electric potential measuring devices operating on principle of vibrating Kelvin Zisman probe allows to localize single microdefects and its groups when their dimensions are less the diameter of vibrating probe, approximately measure surface electric potential and electron work function of these microdefective areas.
Published Kaunas : Technologija
Type Journal article
Language English
Publication date 2006
CC license CC license description