| Abstract [eng] |
The appearance of the ultrashort laser pulses opens up new possibilities in the materials processing, especially in the formation of the 3D microstructures. In this thesis, several topics related to these laser technologies are explored and discussed for the fabrication of microstructures, improvement of feature resolution and enhancement of technology throughput. It was demonstrated a technological combination of selective laser etching and multiphoton polymerization technologies into a novel type micromechanical sensor for the investigation of polymer mechanical properties in different surrounding mediums (liquids, air). Moreover, it was introduced a method for axial feature resolution improvement for multiphoton polymerization by using a pair of two opposing high numerical aperture (NA) objectives (4π excitation). This method allowed an enhancement of axial feature resolution up to three times. Meanwhile, lower numerical aperture objectives can form periodic structures with sub-micron feature size oriented along the optical axis. Moreover, for enhancement of technology, it was proposed a straightforward method to dynamically tune the voxel size during the fabrication in the traditional direct laser writing technique, which effectively expands the fabrication window within the same objective. |
